Comparison Study on SU-8 and Its Composites
نویسندگان
چکیده
منابع مشابه
8 SU - 8 Photolithography and Its Impact on Microfluidics
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15 صفحه اولMicrostructuring of Su-8
Some studies on the fabrication of micro-needles, micro-pillers, and micro-channels using SU-8 negative photoresist for MEMS and bio-applications are reported. The SU-8 processing technology was standardized for the purpose. Micro-pillars were fabricated on SU-8 polymer by soft lithographic technique. Micro-needles were realized on SU-8 film utilizing lensing effect of the etched groove structu...
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SU-8 can be patterned with high resolution, is flexible and tough. These characteristics qualify SU-8 as a material for making spotting pins for printing DNA and protein microarrays, and it can potentially replace the commonly used silicon and steel pins that are expensive, brittle in the case of silicon and can damage the substrate during the printing process. SU-8, however, accumulates large ...
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ژورنال
عنوان ژورنال: American Journal of Aerospace Engineering
سال: 2019
ISSN: 2376-4813
DOI: 10.11648/j.ajae.20190602.11